PANalytical has introduced X'Pert PRO MRD XL, a system that meets the high-resolution XRD analysis requirements of the semiconductor, thin film, and advanced material industries. Capable of 300 mm wafer analysis, and with an automatic wafer loader option, the X'Pert PRO MRD XL is an enlarged version of PANalytical's X'Pert PRO MRD system. By facilitating X-ray analysis during the process development stage, it is claimed that the X'Pert PRO MRD XL represents the logical ‘next step’ in advanced materials analysis. According to PANalytical, the system offers two unique advantages: • complete mapping of wafers up to 200 mm and significantly enhanced mapping of wafers up to 300 mm • a sophisticated, automatic wafer loader option that enables the X'Pert PRO MRD XL to function as an ‘in-wall’ system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder. X'Pert PRO MRD XL is equipped with PreFIX, PANalytical's proprietary system for the exchange of diffractometers, including optical modules. PreFIX eliminates the need for time-consuming realignment when switching from one kind of analysis to another. The system also features the X'Celerator, PANalytical's diffraction solution that has delivered an increase in measurement speed up to a factor of 100. System control comes from the X'Pert Data Collector, part of PANalytical's advanced and modular X'Pert Software range, which is designed specifically for data acquisition and analysis, based on the XML format. The X'Pert PRO MRD XL meets the need for all application techniques, including thin film studies, wafer mapping and stress and texture analysis, making the system effective in application areas such as compound and silicon based semiconductors.